Basis Hood
Chemical hood for exclusive use of basis reagents
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
UNF Devices & Tools
Elionix E-Beam Lithography System
High resolution, high speed e-beam lithography down to nanometers
Electro Plating System
Deposition of Metallic Layers using Electro Plating Technique, Gold Thick Layers Deposition
Tube Furnaces
Oxidation / Annealing / Diffusion of Si wafers up to 100mm diameter
RTA System
Rapid Thermal Annealing of Wafers and Dies
Plasma Asher Diener
Parallel Plates Plasma Generator
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Spin Coating Work Bench
Cleaning of wafers and pieces using Piranha solution
Laser Writer System
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Angstrom Quantum Series Evaporator
Deposition of high quality non magnetic layers
Hall Effect Measurement System
Characterization system to measure density of carriers, mobility, resistivity and type of semiconductor
EDC Spinner
Cleaning of wafers and pieces using Piranha solution
Aligner Wafer Bonder System
Bonding of wafers using thermocompression and anodic bonding methods