UNF Devices & Tools
Ion Milling System
Ion Beam Milling processes and preparations for future ion beam sputtering
Alignment Station
High resolution, high speed e-beam lithography down to nanometers
UHV Sputtering System
UHV Sputtering Layer Deposition
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Sputtering System
Sputtering Layer Deposition
Programmable Hot Plate
Hot Plate for Photolithography Purposes
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Probe Station
Electric Characterization of Samples
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Ellipsometer
Characterization of Transparent Layers
Layer Thickness and Refractive Index
ICP/RIE System
ICP/RIE System
PECVD System
PECVD System
VST Metals Evaporator
Physical Vapor Deposition (PVD)
Glove Box Evaporator
Physical Vapor Deposition (PVD)
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il