Glove Box Evaporator
Physical Vapor Deposition (PVD)
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
UNF Devices & Tools
Glove Box System
Glove Box with ultra pure and dry N2 for work on Oxygen sensitive materials
Reflectometer
Thickness measurement of transparent layers
Polymers Workbench
Workbench for Photo Lithography Development Processing
Polymers Workbench
Work Bench for work on Polymers
Thermal Evaporator
Thermal Evaporation of Chromium and Gold
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
AML Wafer Bonder System
The only on the market capable of in-situ alignment, activation, and bonding.
Plasma Stripper
Plasma RIE with Oxygen
Photo Lithography Development Bench
Workbench for Photo Lithography Development Processing
Inspection Microscope Nikon
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
E-Beam Development Bench
Workbench for Photoresist Spin Coating
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Delta 8 Spinner Bench
Workbench for Photoresist Spin Coating
Mechanical Profilometer - Dektak 150
Profile Scanning of Surfaces
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Corial ICP/RIE System
Dry etching of Si, SiO2 and Si3N4