Manufacturer and model:
E-Beam Development Bench, PVPlast Ltd. Custom Made
General Information:
Workbench for Photoresist Spin Coating
Key Features:
- Spinner for small samples and wafers up to 150mm
- Hot Plate for pre and pos baking
- Bath Cooler for Low Temp Development Process
Applications:
Photoresist Spin Coating of wafers up to 150mm Diameter
Materials:
e-beam resists like PMMA and wafers up to 150mm diameter
Start of Operation Date:
June 2015