UNF Devices & Tools
Clean Room Environment: spinners, ovens, hot plates, etc
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Dr. Shimon Eliav | 02-5494802 | shimonel@savion.huji.ac.il
Mr. Rami Gabay | 02-6584062 | ramig@savion.huji.ac.il
Dektak XT Stylus Profiler
Manufacturer and model: Bruker DektakXTTM Stylus Profiler
Dr. Shimon Eliav | 02-5494802 | shimonel@savion.huji.ac.il
Hall Effect Measurement System
Characterization system to measure density of carriers, mobility, resistivity and type of semiconductor
Dr. Shimon Eliav | 02-6584062 | shimonel@savion.huji.ac.il
Mechanical Profilometer
Optical Profilometer
Optical Profilometer - Surface Topography on Nanometer Scale
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Benchtop SEM
E-Beam Development Bench
Workbench for Photoresist Spin Coating
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Elionix E-Beam Lithography System
High resolution, high speed e-beam lithography down to nanometers
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
ADT 7100 Dicing System
Aligner Wafer Bonder System
Bonding of wafers using thermocompression and anodic bonding methods
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Rami Gabay | 02-6585249 | ramig@savion.huji.ac.il
Wire Bonder Ball
Wire Bonder Wedge
Delta 8 Spinner Bench
Workbench for Photoresist Spin Coating
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Inspection Microscope Nikon
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Laser Writer System
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Mask Aligner MA6
Photo Lithography Development Bench
Workbench for Photo Lithography Development Processing
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Plasma Stripper
ALD (Atomic Layer Deposition)
Angstrom Quantum Series Evaporator
Deposition of high quality non magnetic layers
Maurice Saidian | 02-6585249 | Maurice.saidian@mail.huji.ac.il
Corial ICP/RIE System
Dry etching of Si, SiO2 and Si3N4
Maurice Saidian | 02-6585249 | maurices@savion.huji.ac.il
Metal Evaporator
Physical Vapor Deposition of metallic layers up to 200nm thickness
Maurice Saidian | 02-6585249 | maurices@savion.huji.ac.il
RTA System
Rapid Thermal Annealing of Wafers and Dies
Maurice Saidian | 02-6585249 | maurices@savion.huji.ac.il
Tube Furnaces
Oxidation / Annealing / Diffusion of Si wafers up to 100mm diameter
Noa Mazursky | 02-6586200 | noam@savion.huji.ac.il
Acids Hood
Acids Hood
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Basis Hood
Chemical hood for exclusive use of basis reagents
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
EDC Spinner
Cleaning of wafers and pieces using Piranha solution
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Electro Plating System
Deposition of Metallic Layers using Electro Plating Technique, Gold Thick Layers Deposition
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Plasma Asher Diener
Parallel Plates Plasma Generator
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il