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Manufacturer and model:
Profilometer Dektak XT, Bruker, Dektak XT
General Information:
Stylus Profilometer
Key Features:
- Samples up to 150mm diameter
- Motorized sample stage
- Automatic measurements
- Simple to use
- Practical resolution 1nm
-
Full scale from 6 microns to milimiters
Applications:
Mechanical Profilometer for measuring step heights and roughness, manually or automatically and also layer stress
Materials:
All kinds of wafers. The only restriction is for too soft materials
Start of Operation Date:
May 2016