The Unit for Nanofabrication was established in 2007 and is headed by Dr. Golan A. Tanami.
It includes 300 m2 of clean room facility equipped with state-of-the-art tools and expert technical staff members for preparing nanoscale structures and devices which enable the connection of
nanoscopic objects to the macroscopic world. A special focus is given to processing of inorganic and organic nanomaterials including biomolecules. 
We combine two complementary approaches utilized for nanofabrication:
the “Bottom-Up” approach that is inherent to nano-chemistry and the “Top-Down” approach commonly applied in modern microelectronics efforts to shrink down device dimensions. 
	
Our instruments and facilities include: 
- Lithography tools (optical and electron beam)
 - Metal deposition instruments (by sputtering and evaporation)
 - Etching facilities (wet and reactive ion etching, ion beam etching)
 - Electroplating instrument
 - Chemical vapor deposition facilities (plasma enhanced and low pressure CVDs)
 - Glove box (equipped with spin coater, vacuum oven, evaporator, etc.)
 - Packaging tools (dicing and wire bonding)
 - Characterization tools (profiler, microscopes, thickness measuring instrument, probe station, etc.)
 - Start ups and industrial companies are welcome to use our services
 - We are the only clean room infrastructure provider available for external use in the Jerusalem area.
 
