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Manufacturer and model:

Glove Box System, Mbraun, Custom Made

General Information:

Dicing of Wafers

Key Features:

Two Glove Boxes connected by an anti-chamber. One side dedicated for wet processing and the second side for dry processes. On the wet side: spinner, vacuum furnace, precision scale, hot plate and refrigerator. On the dry side: evaporator and probe-station.

Applications:

Processing of Oxygen and huminity sensitive materials

Materials:

Polymers, Nano Particles, perovskites, etc

Manufacturer Website

Start of Operation Date:

March 2009