Manufacturer and model:
Benchtop SEM, Hitachi TM3030
General Information:
SEM characterization
Key Features:
- Samples up to 3"" diameter
- Magnification from 15 to 30,000
- Acceleration Voltages: 5kV and 15kV
Applications:
Pictures of samples with features smaller than 1µm
Materials:
Si, GaAs, InP, SiO2, Al2O3, etc
Start of Operation Date:
October 2017