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Ellipsometer | Center for Nanoscience and Nanotechnology

Ellipsometer

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Manufacturer and model:

J. A. Woollam Co, Alpha - SE

General Information:

Characterization of Transparent Layers
Layer Thickness and Refractive Index

Key Features:

  • Spectral Range: from 380nm to 900nm, 180 wavelenghts
  • Angle of Incidence: 65°, 70°, 75° and 90°
  • Several Models
  • Large List of Materials

Applications:

Measurement of layer thickness and refractive index of several materials

Materials:

a-Si, poly-Si, DLC, organic materials, SiC

Manufacturer Website

Start of Operation Date:

Dec 2010