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Manufacturer and model:

Mikropack, NanoCalc 2000 UV-VIS 

General Information:

Thickness measurement of transparent layers

Key Features:

• Thickness Measurement of transparent layers
• Mainly photoresists from 10nm to 20µm

Applications:

Thickness measurement of transparent layers mainly for lithography use

Materials:

Photoresists, SiO2, Al2O3 and other transparent materials

Manufacturer Website

Start of Operation Date:

August 2006