Photo Lithography
Programmable Hot Plate
Hot Plate for Photolithography Purposes
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Reflectometer
Thickness measurement of transparent layers
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Polymers Workbench
Work Bench for work on Polymers
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Photo Lithography Development Bench
Workbench for Photo Lithography Development Processing
Inspection Microscope Nikon
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Delta 8 Spinner Bench
Workbench for Photoresist Spin Coating
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Spin Coating Work Bench
Cleaning of wafers and pieces using Piranha solution
Laser Writer System
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Mask Aligner MA6
Traditional Mask Aligner System for Photolithography down to 1µm
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il