Laser Writer System

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Laser Writer

Manufacturer and model:

Laser Writer System Microtech LW405B, Microtech, Palermo Italy

General Information:

Direct Laser Writing Lithography

Key Features:

  • Laser Wavelenght = 405 nm
  • Nominal Resolution less than 0.6 µm
  • Practical Resolution = 1 µm
  • Writing Area = 150mm x 150mm
  • Auto-Focus
  • Four Axis Interferometric Correction 
  • Grayscale Lithography Capability


Photo Lithography without masks down to 1 µm resolution


  • Several types of Photo-resists
  • Wafers and mask up to 150mm

Manufacturer Website

Start of Operation Date:

November  2011