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Manufacturer and model:

Laser Writer System Microtech LW405B, Microtech, Palermo Italy

General Information:

Direct Laser Writing Lithography

Key Features:

• Laser Wavelenght = 405 nm
• Nominal Resolution less than 0.6 µm
• Practical Resolution = 1 µm
• Writing Area = 150mm x 150mm
• Auto-Focus
• Four Axis Interferometric Correction 
• Grayscale Lithography Capability

Applications:

Photo Lithography without masks down to 1 µm resolution

Materials:

• Several types of Photo-resists
• Wafers and mask up to 150mm

Manufacturer Website

Start of Operation Date:

November  2011