Ion Milling System
Ion Beam Milling processes and preparations for future ion beam sputtering
Thin Film Process
UHV Sputtering System
UHV Sputtering Layer Deposition
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Sputtering System
Sputtering Layer Deposition
ICP/RIE System
ICP/RIE System
PECVD System
PECVD System
VST Metals Evaporator
Physical Vapor Deposition (PVD)
Glove Box Evaporator
Physical Vapor Deposition (PVD)
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Thermal Evaporator
Thermal Evaporation of Chromium and Gold
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Corial ICP/RIE System
Dry etching of Si, SiO2 and Si3N4
Tube Furnaces
Oxidation / Annealing / Diffusion of Si wafers up to 100mm diameter
RTA System
Rapid Thermal Annealing of Wafers and Dies
Angstrom Quantum Series Evaporator
Deposition of high quality non magnetic layers
ALD (Atomic Layer Deposition)
Atomic Layer Deposition System
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il