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Manufacturer and model:
Angstrom Quantum Series Evaporator Custom Made Quantum Series Angstrom Engineering
General Information:
Deposition of high quality non magnetic layers
Key Features:
- Two chambers configuration
- Bottom Chamber for the deposition materials (e-beam source)
- Top Chamber for samples and processing
- Chamber separated by Gate Valve
- Bottom Chamber base pressure = 3 x 10-9 Torr
- Top Chamber base pressure = 5 x 10-8 Torr
- Sample Size up to 100mm diameter
- Sample cooling down to -5°C
- Sample continuous rotation up to 40 rpm
- ± 95° Sample Tilt Capability
- ± 0.06° Tilt Repeatability
- Static and Dynamic Oxidation
- Ion Beam Source for sample surface cleaning
- High Deposition Rate up to 20Å/sec
Applications:
- Fabrication of Josephson Junctions
- Deposition of High Quality Aluminum layers
Materials:
Titanium (Ti), Aluminum (Al)
Start of Operation Date:
October 2019