Plasma Asher Diener

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Plasma Asher Diener

Manufacturer and model:

Plasma Asher Diener, Pico

General Information:

Parallel Plates Plasma Generator 

Key Features:

  • O2, N2 and Ar Gas Lines
  • Base Pressure down to 5x10-3 Torr
  • RF Frequency: 40kHz
  • RF Power: 200W


Surface activation, passivation and cleaning


Si, SiO2, Polymers

Manufacturer Website

Start of Operation Date:

June 2007