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Manufacturer and model:
EDC Spinner, Laurell, EDC-650Hz-23TFMB
General Information:
Cleaning of wafers and pieces using Piranha solution
Key Features:
- Fully automated system for wafer cleaning with Piranha
- Dry-in Dry-out Concept
- Uses Piranha ready made solution
- Wafers from 2" to 6" diameter
- Lithography Masks of 4" x 4"
- Small pieces of 10mm x 10mm or 20mm x 20mm
Applications:
Cleaning of wafers and pieces using Piranha solution
Materials:
wafers and pieces of Si, SiO2, Quartz, Saphire
Start of Operation Date:
August 2020