UNF Devices & Tools
Clean Room Environment: spinners, ovens, hot plates, etc
Amit Benbenishty | 02-6584062 | amitbenbe@savion.huji.ac.il
Ellipsometer
Characterization of Transparent Layers
Layer Thickness and Refractive Index
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Hall Effect Measurement System
Characterization system to measure density of carriers, mobility, resistivity and type of semiconductor
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Mechanical Profilometer
Profile Scanning of Surfaces
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Optical Profilometer
Optical Profilometer - Surface Topography on Nanometer Scale
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Probe Station
Electric Characterization of Samples
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Profilometer Dektak XT
Alignment Station
High resolution, high speed e-beam lithography down to nanometers
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Benchtop SEM
E-Beam Development Bench
Workbench for Photoresist Spin Coating
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Elionix E-Beam Lithography System
High resolution, high speed e-beam lithography down to nanometers
Dr. Itzik Shweky | 02-6586127 | Itzhak.shweky@mail.huji.ac.il
Aligner Wafer Bonder System
Bonding of wafers using thermocompression and anodic bonding methods
Rami Gabay | 02-6585249 | ramig@savion.huji.ac.il
AML Wafer Bonder System
The only on the market capable of in-situ alignment, activation, and bonding.
Mr. Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Dicing System
Glove Box System
Glove Box with ultra pure and dry N2 for work on Oxygen sensitive materials
Alexander Oginets | 02-5494062 | alexandero@savion.huji.ac.il
Wire Bonder Ball
Wire Bonder Wedge
Delta 8 Spinner Bench
Workbench for Photoresist Spin Coating
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Inspection Microscope Nikon
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Inspection Microscope Olympus
Laser Writer System
Direct Laser Writing Lithography
Dr. Itzik Shweky | 02-6585249 | Itzhak.shweky@mail.huji.ac.il
Mask Aligner MA6
Traditional Mask Aligner System for Photolithography down to 1µm
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Memmert Oven
Photo Lithography Development Bench
Workbench for Photo Lithography Development Processing
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Plasma Stripper
Polymers Workbench
Work Bench for work on Polymers
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Programmable Hot Plate
Hot Plate for Photolithography Purposes
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Reflectometer
Thickness measurement of transparent layers
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Spin Coating Work Bench
Cleaning of wafers and pieces using Piranha solution
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
ALD (Atomic Layer Deposition)
Atomic Layer Deposition System
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Angstrom Quantum Series Evaporator
Deposition of high quality non magnetic layers
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Corial ICP/RIE System
Dry etching of Si, SiO2 and Si3N4
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Glove Box Evaporator
Physical Vapor Deposition (PVD)
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
ICP/RIE System
Ion Milling System
Ion Beam Milling processes and preparations for future ion beam sputtering
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
PECVD System
RGA System
RTA System
Rapid Thermal Annealing of Wafers and Dies
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Sputtering System
Sputtering Layer Deposition
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Thermal Evaporator
Thermal Evaporation of Chromium and Gold
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
Tube Furnaces
Oxidation / Annealing / Diffusion of Si wafers up to 100mm diameter
Noa Mazursky | 02-6586200 | noam@savion.huji.ac.il
UHV Sputtering System
UHV Sputtering Layer Deposition
Alexander Oginets | 02-6585249 | alexandero@savion.huji.ac.il
VST Metals Evaporator
Physical Vapor Deposition (PVD)
Maurice Saidian | 02-6585249 | maurice.saidian@mail.huji.ac.il
Polymers Workbench
Workbench for Photo Lithography Development Processing
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Acids Hood
Work Bench for Acid Wet Etching
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Basis Hood
Chemical hood for exclusive use of basis reagents
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
EDC Spinner
Cleaning of wafers and pieces using Piranha solution
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Electro Plating System
Deposition of Metallic Layers using Electro Plating Technique, Gold Thick Layers Deposition
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il
Plasma Asher Diener
Parallel Plates Plasma Generator
Galina Chechelitsky | 02-6586127 | galinac@savion.huji.ac.il