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Manufacturer and model:
Plasma Asher Harrick, Harrick Plasma PDC-002
General Information:
Barrel Plasma Asher
Key Features:
- O2 and Air Enviroment
- Base Pressure down to 50 mTorr
- RF Frequency: 40kHz
- RF Power: 45W
Applications:
Surface activation, passivation and cleaning
Materials:
Si, SiO2, Polymers
Start of Operation Date:
March 2017