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Manufacturer and model:
AJA, USA | ATC Series
General Information:
Ion Beam Milling processes and preparations for future ion beam sputtering
Key Features:
- Ion Beam Gun with 40mm diameter
- Rotating and cooled Sample Holder up to 100mm wafers
- Automated sample tilt from 0° to 90°
- Preparations for future ion beam sputtering
- Preparations for future installation of SIMS end point detector
- Preparations for future Load-lock installation
- Base pressure down to 3x10-7 Torr (Cryo Pump)
Applications:
Physical Etching (milling)
Future Ion Beam Sputtering (IBS)
Materials:
All metals, dielectrics, composite materials, etc
Start of Operation Date:
Nov 2021