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Manufacturer and model:
Olympus, BX51TRF
General Information:
Optical Microscope
Key Features:
- Halogen Illumination + Yellow Filter
- Objectives: X5, X10, X20, X50 and X100
- Down and Up Illumination
- Slots for two filters
- Dark Field and Bright Field Modes
- Camera and Software for Image Acquisition & Measurements
- Manual Stage
Applications:
Sample inspection into the photolithography room
Materials:
Samples with different types of photoresist
Start of Operation Date:
April 2007