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Manufacturer and model:
RGA System, VST, Custom Made
General Information:
RGA analisys up to 300C
Key Features:
- Vacuum system with Turbo Pump
- Base Pressure 6 x 10-6 Torr
- Annealing up to 300C with ramp programming
- RGA 200 analysis
- in situ DC plasma cleaning
Applications:
- Check-out of unknown samples prior vacuum processing, annealing under special conditions
- DC plasma cleaning under special conditions
Materials:
All sort of unknown materials
Start of Operation Date:
Nov 2009