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Manufacturer and model:
VST Metals Evaporator, VST, Custom Made
General Information:
Physical Vapor Deposition (PVD)
Key Features:
- Cryo Vacuum Pump
- Base pressure = 3x10-7 Torr
- E-gun with 6 pockets of 12cc
- Two thermal sources
- Sample cooling and rotation
Applications:
Metal deposition forl ift-off process
Materials:
Cr, Ti, Au, Pt, Pd, Al, Cu, Ge, Ni, etc
Start of Operation Date:
Jan 2007