Manufacturer and model:
Delta 8 Spinner Bench, PVPlast Ltd. Custom Made
General Information:
Workbench for Photoresist Spin Coating
Key Features:
- Spinner for 200mm diameter wafers
- Hot Plate for pre and pos baking"
Applications:
Photoresist Spin Coating of wafers up to 200mm Diameter
Materials:
All types of photoresists and wafers up to 200mm diameter
Start of Operation Date:
December 2007