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Manufacturer and model:
Plasma Asher Diener, Pico
General Information:
Parallel Plates Plasma Generator
Key Features:
- O2, N2 and Ar Gas Lines
- Base Pressure down to 5x10-3 Torr
- RF Frequency: 40kHz
- RF Power: 200W
Applications:
Surface activation, passivation and cleaning
Materials:
Si, SiO2, Polymers
Start of Operation Date:
June 2007