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Manufacturer and model:

Spin Coating Work Bench, Custom Made, PVPlast Ltd.

General Information:

Work bench for sample preparation before lithography processIt means spin coating + hot plate backing

Key Features:

• 2 Spinners Suss model Delta 6
• Three Hot Plates model EMS 1000
• 2 Timers

Applications:

• Photo-resist spin coating
• Sample pre-baking
• Photo-resist soft backing
• Photo-resist hard backing

Materials:

Photo-resistes of several types, all kind of wafers up to 6" diameter

Manufacturer Website

Start of Operation Date:

May 2007