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Manufacturer and model:
Laser Writer System Microtech LW405B, Microtech, Palermo Italy
General Information:
Direct Laser Writing Lithography
Key Features:
- Laser Wavelenght = 405 nm
- Nominal Resolution less than 0.6 µm
- Practical Resolution = 1 µm
- Writing Area = 150mm x 150mm
- Auto-Focus
- Four Axis Interferometric Correction
- Grayscale Lithography Capability
Applications:
Photo Lithography without masks down to 1 µm resolution
Materials:
- Several types of Photo-resists
- Wafers and mask up to 150mm
Start of Operation Date:
November 2011