Ion Milling System

back to UNF devices & tools >>

 

Manufacturer and model:

AJA, USA | ATC Series

General Information:

Ion Beam Milling processes and preparations for future ion beam sputtering

Key Features:

  • Ion Beam Gun with 40mm diameter
  • Rotating and cooled Sample Holder up to 100mm wafers
  • Automated sample tilt from 0° to 90°
  • Preparations for future ion beam sputtering
  • Preparations for future installation of SIMS end point detector
  • Preparations for future Load-lock installation
  • Base pressure down to 3x10-7 Torr (Cryo Pump)

Applications:

Physical Etching (milling)
Future Ion Beam Sputtering (IBS)

Materials:

All metals, dielectrics, composite materials, etc

Manufacturer Website

Start of Operation Date:

 

Nov 2021