Alignment Station

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Manufacturer and model:

Elionix, Japan. ELS-G100 Acessory

General Information:

High resolution, high speed e-beam lithography down to nanometers

Key Features:

Sub-micron registration
On-line coordinates transfer to Elionix E-Beam System

Applications:

  • Pre-alignment for e-beam lithography processes
  • General coordinates acquisition
  • Sample dimensions measurements

Materials:

all kind of samples and different materials

MANUFACTURER WEBSITE

Start of Operation Date:

Dec 2018