Inspection Microscope Olympus

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Manufacturer and model:

Olympus, BX51TRF

General Information:

Optical Microscope 

Key Features:

  • Halogen Illumination + Yellow Filter
  • Objectives: X5, X10, X20, X50 and X100
  • Down and Up Illumination
  • Slots for two filters
  • Dark Field and Bright Field Modes
  • Camera and Software for Image Acquisition & Measurements
  • Manual Stage

Applications:

Sample inspection into the photolithography room

Materials:

Samples with different types of photoresist

MANUFACTURER WEBSITE 

Start of Operation Date:

April 2007