RGA System

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RGA System

Manufacturer and model:

RGA System, VST, Custom Made 

General Information:

 RGA analisys up to 300C

Key Features:

  • Vacuum system with Turbo Pump
  • Base Pressure 6 x 10-6 Torr
  • Annealing up to 300C with ramp programming
  • RGA 200 analysis
  • in situ DC plasma cleaning

Applications:

  • Check-out of unknown samples prior vacuum processing, annealing under special conditions
  • DC plasma cleaning under special conditions

Materials:

All sort of unknown materials

Manufacturer Website

Start of Operation Date:

Nov 2009