VST Metals Evaporator

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VST Metals Evaporator

Manufacturer and model:

VST Metals Evaporator, VST, Custom Made 

General Information:

Physical Vapor Deposition (PVD)

Key Features:

  • Cryo Vacuum Pump
  • Base pressure = 3x10-7 Torr
  • E-gun with 6 pockets of 12cc
  • Two thermal sources
  • Sample cooling and rotation

Applications:

Metal deposition forl ift-off process

Materials:

Cr, Ti, Au, Pt, Pd, Al, Cu, Ge, Ni, etc

Manufacturer Website

Start of Operation Date:

Jan 2007