Glove Box Evaporator

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glove box evaporator

Manufacturer and model:

Glove Box Evaporator, VST, Custom Made 

General Information:

Physical Vapor Deposition (PVD)

Key Features:

  • Cryo Vacuum Pump
  • Base pressure = 3x10-7 Torr
  • E-gun with 6 pockets of 7cc
  • Two thermal sources, sample cooling and rotation
  • Two doors: one to the glovebox and one to outside

Applications:

Metal deposition forl ift-off process

Materials:

Cr, Ti, Au, Pt, Pd, Al, Cu, Ge, Ni, Al2O3, SiO2, Ta, Nb, W, others

Manufacturer Website

Start of Operation Date:

March 2009