Plasma Stripper

plasma s

Manufacturer and model:

Plasma Stripper, March, Jupiter III

General Information:

Plasma RIE with Oxygen

Key Features:

  • 300 W Power
  • Two Gas Lines
  • Samples up to 150mm diameter

Applications:

Photoresist Asher

Materials:

Si wafers covered with photoresist

MANUFACTURER WEBSITE

Start of Operation Date:

February 2012