Benchtop SEM

benchtop shem

 

Manufacturer and model:

Benchtop SEM, Hitachi TM3030

General Information:

SEM characterization

Key Features:

  • Samples up to 3"" diameter
  • Magnification from 15 to 30,000
  • Acceleration Voltages: 5kV and 15kV

Applications:

Pictures of samples with features smaller than 1µm

Materials:

Si, GaAs, InP, SiO2, Al2O3, etc

MANUFACTURER WEBSITE

Start of Operation Date:

October 2017