Metal Evaporator

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Metal Evaporator

Manufacturer and model:

Metal Evaporator TFDS-462B, VST Ltd.

General Information:

Physical Vapor Deposition of metallic layers up to 200nm thickness

Key Features:

  • E-gun Telemark 6 pockets 7cc
  • Two thermal sources
  • Sample Holder up to 150mm diameter
  • Rotating and Cooled Sample Holder
  • Cryopump Vacuum System
  • Base Pressure = 3 x 10-7 Torr
  • Deposition Controller Telemark


  • Lift-off Depositions
  • Contact Depositions
  • Stack of different deposited layers


Ti, Cr, Au, Pd, Pt, Ta, Ge, Ag, Ni, Al, SiO2, Al2O3

Manufacturer Website

Start of Operation Date:

July 2007