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Dektak XT Stylus Profiler | Center for Nanoscience and Nanotechnology

Dektak XT Stylus Profiler

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Dektak_XT_Stylus_Profiler

​Manufacturer and model:

Profilometer Dektak XT, Bruker, Dektak XT

General Information:

Stylus Profilometer 

Key Features:

  • Samples up to 150mm diameter
  • Motorized sample stage
  • Automatic measurements
  • Simple to use
  • Practical resolution 1nm
  • Full scale from 6 microns to milimiters
     

Applications:

Mechanical Profilometer for measuring step heights and roughness, manually or automatically and also layer stress

Materials:

All kinds of wafers. The only restriction is for too soft materials

MANUFACTURER WEBSITE

Start of Operation Date:

May 2016