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Manufacturer and model:
Helios Nanolab 460F1Lite Dual Beam Focused Ion Beam/Scanning Electron Microscope (ThermoFisher, former FEI)
General Information:
Helios DB FIB/SEM provides a high resolution imaging with an electron beam and precise and accurate ion milling with the beam of Ga+ ions. The combination of two charged-particle probes makes Helios a powerful tool for a great variety of research fields and high tech industrial applications. In addition to the traditional scanning electron microscopy applications, the instrument provides nanoscale patterning and deposition as well as a highly precise 3D analysis of subsurface structure (FIB tomography) and accurate sample preparation for transmission electron microscopy.
Key Features:
Helios DB FIB/SEM is equipped the monochromated Schottky-type FEG and a comprehensive set of electron detectors for scanning and scanning transmission electron microscopy. With a beam decelerator the landing energy of scanning electrons could be decreased down to 20 eV. A local elemental analysis and imaging is available with the EDS (energy dispersive X-Ray spectroscopy) via a large area Oxford XMAX Silicon drift detector working under AZtec platform. The automated load lock allows to exchange the sample within 100 sec. The CryoCan and the in situ Plasma Cleaner provide contamination-free imaging at the lowest landing energies.
An ion part of the instrument allows precise, accurate and fast material modification with Ga+ ions at energies of 500 eV - 30 keV. Three gas injector systems (GIS) are available for electron and ion assisted deposition of C, Pt and etching with XeF2 to cover major applications of TEM lamella preparation and materials' milling. In addition to the bulk 5-axis piezo-driven stage the instrument is equipped with a flip-stage providing simultaneous TEM sample preparation and STEM imaging. In situ sample lift – out is provided by the EasyLift Nanomanipulator. An embedded iFAST automation and Nanobuilder allow automated run of complicated tasks for large number of ROIs and samples.
Start of Operation Date:
January 2016