THE HEBREW UNIVERSITY CENTER FOR NANOSCIENCE AND NANOTECHNOLOGY

The Unit for Nanofabrication


The Unit for Nanofabrication (UNF), provides some of the state-of-the-art tools for preparing nanoscale structures and devices, which enable the connection of nanoscopic objects to the macroscopic world.

ALD (Atomic Layer Deposition)

​​​Overview

Clean Room Environment: spinners,ovens, hot plates, etc

Dektak XT Stylus Profiler

Overview

Dicer - ADT 7100 2" Pro Vectus

Ellipsometry

Glove Box

HVS- High Vacuum Sputtering System MS 75x4-L

ICP Etching - Inductively Coupled Plasma Etch

Mask Aligner

Optical Microscopy I

Optical Microscopy II

Oven - Memmert

Plasma Enhanced Chemical Vapour Deposition PECVD

Plasma System

Probe Station + 4 point probe

Raith e_LiNE - e-Beam Lithography System

Rapid Thermal Processor

Surface Profiler

Thin Film Deposition System Vacuum Coater

Thin Film Reflectometry System

Wire Bonder