THE HEBREW UNIVERSITY CENTER FOR NANOSCIENCE AND NANOTECHNOLOGY

Ellipsometry


Manufacturer and model: J.A . Woollam alpha-SE

Applications:

Dielectric Films:
With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying
thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds.
Log results for easy-to-use comparisons in both graphical and tabular formats.

Absorbing Films
Advanced models allow quick and efficient fits for a wide variety of materials you may encounter.

Materials
  • a-Si
  • poly-Si
  • Diamond-like carbon
  • Organic materials
  • Organic LED films
  • SiC
Coating on Glass
Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass. For transparent substrates, the alpha-SE® measures depolarization to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE insures accurate optical constants.

Specifications:
Data Acquisition Rate
3 sec. (Fast mode) 10 sec. (Standard mode) 30 sec. (High-precision mode)
Spectral Range
380nm to 900nm, 180 wavelengths
Angle of Incidence
65°, 70°, 75° or 90° (straight-through)

For More Information:
http://www.jawoollam.com/pdf/AlphaBrochure.pdf